Data For Manuscript: Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography

Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.
Organization: National Institute of Standards and Technology
Last updated: 2022-10-27T09:34:16.512237
Tags: cavity-optomechanical-sensors, integrated-photonics