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Data For Manuscript: Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography

Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.
Organization: Department of Commerce
Last updated: 2025-09-30T05:13:08.721504
Tags: cavity-optomechanical-sensors, integrated-photonics

Tables

Experimental Data For Figure 4(b)

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.experimental_data_for_figure_4_b

340.95 kB
39,997 rows
2 columns

CREATE TABLE experimental_data_for_figure_4_b (
  "wavelength_nm" DOUBLE  -- Wavelength (nm),
  "n__transm_power_v" DOUBLE  -- Transm Power (V)
);

Experimental Data For Figure 4c

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.experimental_data_for_figure_4c

8.77 kB
601 rows
2 columns

CREATE TABLE experimental_data_for_figure_4c (
  "wavelength_nm" DOUBLE  -- Wavelength (nm),
  "n__transm_power_v" DOUBLE  -- Transm Power (V)
);

Experimental Data For Figure 4d, 10 Micrometer Disk.

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.experimental_data_for_figure_4d_10_micrometer_disk

11.27 kB
476 rows
2 columns

CREATE TABLE experimental_data_for_figure_4d_10_micrometer_disk (
  "frequency_mhz" DOUBLE  -- Frequency (MHz),
  "n__spect_density_fm_hz_0_5" DOUBLE  -- Spect Density (fm/Hz^0.5)
);

Experimental Data For Figure 4d, 5 Micrometer Disk

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.experimental_data_for_figure_4d_5_micrometer_disk

11.45 kB
485 rows
2 columns

CREATE TABLE experimental_data_for_figure_4d_5_micrometer_disk (
  "frequency_mhz" DOUBLE  -- Frequency (MHz),
  "n__spect_density_fm_hz_0_5" DOUBLE  -- Spect Density (fm/Hz^0.5)
);

Fit Data For Figure 4c

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.fit_data_for_figure_4c

6.59 kB
231 rows
2 columns

CREATE TABLE fit_data_for_figure_4c (
  "wavelength_nm" DOUBLE  -- Wavelength (nm),
  "n__transm_power_v" DOUBLE  -- Transm Power (V)
);