Name: Data For Manuscript: Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography
Creator: US Government
Published: 2025-10-23T08:15:24.600Z
License: https://www.nist.gov/open/license

Department of Commerce

Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.
Organization: Department of Commerce
Last updated: 2025-09-30T05:13:08.721504
Tags: cavity-optomechanical-sensors, integrated-photonics

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