About this Dataset

Data For Manuscript: Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography

Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.
Organization: Department of Commerce
Last updated: 2025-09-30T05:13:08.721504
Tags: cavity-optomechanical-sensors, integrated-photonics

Tables

Experimental Data For Figure 4(b)

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.experimental_data_for_figure_4_b

340.95 kB
39,997 rows
2 columns

Experimental Data For Figure 4c

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.experimental_data_for_figure_4c

8.77 kB
601 rows
2 columns

Experimental Data For Figure 4d, 10 Micrometer Disk.

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.experimental_data_for_figure_4d_10_micrometer_disk

11.27 kB
476 rows
2 columns

Experimental Data For Figure 4d, 5 Micrometer Disk

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.experimental_data_for_figure_4d_5_micrometer_disk

11.45 kB
485 rows
2 columns

Fit Data For Figure 4c

@usgov.doc_gov_data_for_manuscript_integrated_photonic_optome_d3e2e481.fit_data_for_figure_4c

6.59 kB
231 rows
2 columns