Name: Data For Manuscript: Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography
Creator: US Government
License: https://www.nist.gov/open/license

Department of Commerce

Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.
Organization: Department of Commerce
Last updated: 2025-09-30T05:13:08.721504
Tags: cavity-optomechanical-sensors, integrated-photonics

Related Datasets

Data For Manuscript: Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography

@usgov
Data For "Trap-Integrated Superconducting Nanowire Single-Photon Detectors With Improved RF Tolerance For Trapped-Ion Qubit State Readout"

@usgov
"High Dynamic Range Electro-optic Dual-comb Interrogation Of Optomechanical Sensors" To Be Published In Optics Letters.

@usgov
Data Underlying "Sub-Doppler Spectroscopy Of Quantum Systems Through Nanophotonic Spectral Translation Of Electro-optic Light" Https://arxiv.org/abs/2309.16069

@usgov
Data For "Trap-integrated Superconducting Nanowire Single-photon Detectors For Trapped-ion Qubit State Readout"

@usgov
Data For Manuscript: Scalable And Robust Beam Shaping Using Apodized Fish-bone Grating Couplers

@usgov

Data For Manuscript: Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography

Data For "Trap-Integrated Superconducting Nanowire Single-Photon Detectors With Improved RF Tolerance For Trapped-Ion Qubit State Readout"

"High Dynamic Range Electro-optic Dual-comb Interrogation Of Optomechanical Sensors" To Be Published In Optics Letters.

Data Underlying "Sub-Doppler Spectroscopy Of Quantum Systems Through Nanophotonic Spectral Translation Of Electro-optic Light" Https://arxiv.org/abs/2309.16069

Data For "Trap-integrated Superconducting Nanowire Single-photon Detectors For Trapped-ion Qubit State Readout"

Data For Manuscript: Scalable And Robust Beam Shaping Using Apodized Fish-bone Grating Couplers