Context
I collected the data from the brochures of metrology instruments during my PhD thesis in surface metrology applied to Cultural Heritage diagnostics. In some case, I left the website where the specs can be found. My main goal was to perform a technology exploration and assess the performance of the system I was developing.
Content
The data presented is an exported version of the spreadsheet I have created on Google sheets at this link. It contains the specifications of instruments used for dimensional analysis and surface metrology. I copied manually the field from the datasheet and performed the conversions to a common unit. It contains coherence scanning interferometers, structured-light scanners, focus variation and many other systems used in surface metrology and dimensional analysis. It does not contain LiDAR system or depth-cameras or pure photogrammetric stereo systems.
This dataset is not an exhaustive list but contains a variety of techniques and specifications. All the instruments shown are commercial products except the conoscopy holography system which is a prototype.
Note that there is not an accepted common way to express many figures of merits, and actually in many cases is not possible to express the performance using a single value. Hence the values reported are only indicative.
Inspiration
What's the portable system with the highest accuracy on the market? What non-contact instruments can be used on fragile materials?
How to cite it
You can cite it from the metadata page.